Mks Astron 2l Manual ✪

is designed as an integrated module, combining the power source, control module, and plasma chamber into a single compact unit. Specification AX7651 / AX7657 series Cooling Water-cooled: ~2.0 gpm flow at < 30°C Input Voltage 180 to 228 VAC, 50/60 Hz, 3 Phase (typical for series) Control Interface 9-pin and 25-pin D-sub connectors Ignition Gas 100% Argon (Ar) required for plasma ignition only Process Gas Up to 6 slm of NF3cap N cap F sub 3 (post-ignition) Wetted Materials Hardcoat anodized Aluminum, Alumina, Chemraz® Installation Guide

| Pin | Signal | Description | |-----|--------|-------------| | 1 | HV Return | High voltage return | | 2 | Case Ground | Chassis ground | | 3 | HV Out | -3.5 kV to -5 kV to gauge | | 4 | Current In | Gauge current signal | | 5 | NC | Not connected | | 6 | Shield | Cable shield | | 7 | +24V In | Power input (if using DC) | | 8 | Power Return | Ground for power | | 9 | NC | Not connected | mks astron 2l manual

ASTRON AX7680 Series Manual : Provides detailed installation and safety instructions for similar reactive gas generators. is designed as an integrated module, combining the

), which then reacts with chamber wall deposits to form easily scrubbed gases. The MKS Astron 2L is a mass flow

The MKS Astron 2L is a mass flow controller designed to accurately measure and control gas flows in a wide range of applications, including semiconductor processing, surface analysis, and research experiments. The device features a compact design, high accuracy, and fast response time, making it a reliable choice for various industrial and research settings. The Astron 2L operates on the principle of thermal mass flow measurement, which provides a direct and accurate measurement of gas flow rates.